The 15th IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC)

392 / 2019-02-10 16:16:23

A Novel Resistive Field Plate Superjunction like Structure Simulation Study

RESURF,Resistive Field Plate,Charge Balance,Superjunction

Plenary track > Power Electronics

A novel superjunction-like ultralow Specific On-Resistance (Ron,sp) structure is proposed based on Resistive Field Plate and RESURF principle. The numerical simulation results show that the structure features Ron,sp of 12mΩ∙cm2 at 628V blocking voltage, even down to 3.4mΩ∙cm2 at 5V forward bias with 603V blocking voltage. In terms of charge balance behavior, the structure features peak breakdown voltage (BV) point ranging from 611V to 642V with charge imbalance from -75% to +100%, which is more larger than popular superjunction structure.