23rd IMEKO TC 4 International Symposium and the 5th Chinese Conference on Electromagnetic Metrology Technical (IMEKO TC4 2019)

186 / 2019-05-07 23:19:49

Design of ATE Calibration Device Based on Microelectric Reference Materials

ATE, calibration, Reference materials

Plenary track > Calibration, Metrology and Standards

Microelectronic Reference materials(RMs) are a good way to achieve microelectronic traceability. To achieve full calibration of Automated Test Equipment（ATE）， each test channel should be traced to calibration device of ATE based on RMs. This paper puts forward a design solution of calibration device of ATE based on RMs, which can realize the versatility and portability of calibration device, and realize automatic calibration progress.