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112 / 2019-09-30 21:57:52
偏压对高功率磁控溅射CrAlN阻氢薄膜结构及性能影响
阻氢薄膜；CrAlN；高功率磁控溅射；高温抗氧化
Plenary track > 薄膜制备技术
Draft Pending
巩春志 / 哈尔滨工业大学
Important Date

  • Conference Date

    Nov 15

    2019

    to

    Nov 18

    2019

  • Nov 01 2019

    Draft paper submission deadline

  • Nov 18 2019

    Registration deadline

Organized By
浙江大学
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