113 / 2021-03-18 14:19:50
Improved performance of GaN-based LEDs with PVD AlN
PVD AlN, crystal quality, LEDs
Final Paper
WEI JUN CHEN / 深圳晶相技术有限公司
YAN JUN LIU / 深圳晶相技术有限公司
AVA CHEN LI / 深圳市晶相技术有限公司
The crystal quality of GaN based light emitting diodes (LEDs) with sputtered physical vapor deposition (PVD) aluminum nitride (AlN) nucleation layers were investigated. Is was found that the crystal quality in terms of defect density and X-ray diffraction linewidth was greatly improved. The light output power was increased, and reverse bias voltage of leakage current was increased on LEDs with PVD AlN nucleation layers.
Important Date
  • Conference Date

    Jul 10

    2021

    to

    Jul 12

    2021

  • May 10 2021

    Draft paper submission deadline

  • Jul 06 2021

    Registration deadline

Sponsored By
Changsha University of Science & Technology
Supported By
IEEE Electron Devices Society
IEEE
Contact Information