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Numerical Simulation of ICP source Impedance and Experimental Verification
ID：138 View Protection：PUBLIC Updated Time：2020-11-03 21:11:22 Hits：894 Poster Presentation

Start Time：2020-11-04 15:15（Asia/Shanghai）

Duration：5min

Session：G Poster session » G5Poster Session 5

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Abstract
Obtaining the equivalent impedance of the Inductively Coupled Plasma (ICP) source driver is very important in the design of impedance matching circuit. For this reason, we built a 3D model in MAXWELL software. The plasma is equivalent to a uniform conductive medium.The electromagnetic field under the condition of 1MHz excitation current is solved.And we calculated the equivalent impedance of the driver by means of vector volume integration.Then we used the potassium chloride (kcl) solution with a certain conductivity to simulate plasma.It was put into the driver and we measured the impedance of the driver. The simulation results and the measurement result were compared and verified.
Keywords
Conductivity;ICP;Impedance
Speaker
Zhou Lei
Huazhong University of Science and Technology

Submission Author
Zhou Lei Huazhong University of Science and Technology
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Important Date

  • Conference Date

    Nov 02

    2020

    to

    Nov 04

    2020

  • Oct 27 2020

    Draft paper submission deadline

  • Nov 03 2020

    Contribution Submission Deadline

  • Nov 04 2020

    Registration deadline

  • Nov 17 2020

    Final Paper Deadline

Sponsored By
IEEE IAS Student Chapter of Huazhong University of Science and Technology (HUST)
Organized By
Huazhong University of Science and Technology
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