19th Asia-Pacific Vibration Conference (APVC2021)

In Japan, earthquake damage such as the Great East Japan Earthquake(GEJE) and the Kumamoto Earthquake occurs frequently. Facilities such as semiconductor manufacturing factories, which require expensive and high-performance equipment, carry economic risks due to damage to those equipment caused by the earthquake. Some general industrial equipment has anti-vibration technology applied to the foundation, but since they target the vibration region with small amplitude and high frequency, they cause great damage to the input of large displacement caused by seismic motion. There is a risk of it occurring.
Therefore, in this study, we examine a method of floating the equipment by air and physically insulating the equipment from the foundation. In this study, we study a device that reduces seismic input by using aerodynamic levitation technology, aiming at avoiding damage to the device and maintaining the function of the system for mechanical structures such as anti-vibration devices.
In this study, a vibration experiment was conducted to evaluate the effect of reducing the acceleration response. The test equipment assuming a mechanical structure is floated with air, and the vibration response of the test equipment is measured and evaluated by inputting seismic waves. In addition, in order to examine the parameters of the device in the future, we will perform a reproduction analysis in this study. The behavior during aerodynamic levitation is analyzed by time history response analysis that considers non-linear factors such as friction.
 

Air floating,base isolation,vibration isolation,shaking table test,time response analysis