2022 IEEE 5th International Electrical and Energy Conference (CIEEC 2022)

The piezoelectric transformer has the advantage of high power density, high boost ratio and low electromagnetic interference. It is often used to generate AC and DC high voltage, but there are few studies on the generation of pulse high voltage. In this paper, a quasi-pulse power supply system based on piezoelectric transformer is proposed and designed. The control of the power supply system consists of two parts. The first part is the tracking control of the resonant frequency of the piezoelectric transformer, and the second part is the specific harmonic control method of the piezoelectric transformer. The hardware circuit of the power supply system is designed, and a fast decomposition calculation method of resonant current component is proposed to realize the fast sampling of harmonic amplitude and phase. A prototype of pulse power supply based on piezoelectric transformer is designed and manufactured, and a plasma jet is generated using the prototype.