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Unified Eikonal-Wulff Framework for Anisotropic Wet Etching Profile Prediction: Theory and Application to Quartz MEMS
ID：164 View Protection：ATTENDEE Updated Time：2025-11-21 00:50:10 Hits：185 Oral Presentation

Start Time：2025-11-23 11:30（Asia/Shanghai）

Duration：20min

Session：S4 Parallel Session 4 » S4-2Parallel Session 4-23 AM

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Abstract
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Keywords
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Speaker
Yuqian Xie
Xidian University

Submission Author
Yuqian Xie Xidian University
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Important Date

  • Conference Date

    Nov 21

    2025

    to

    Nov 23

    2025

  • Oct 20 2025

    Draft paper submission deadline

  • Dec 08 2025

    Registration deadline

Sponsored By
IEEE Instrumentation and Measurement Society
South China University of Technology
Organized By
South China University of Technology
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