Presentation Details
  1. Home
  2. Presentation List
  3. Presentation Details
High-speed measurement of Piezoelectric MEMS equivalent circuit parameters by Swept-sine and PRBS signals
ID：55 View Protection：PUBLIC Updated Time：2021-08-24 16:35:28 Hits：788 Oral Presentation

Start Time：2021-08-20 11:50（Asia/Shanghai）

Duration：20min

Session：RS Regular Paper Session » RS3A4 Circuit Design and Evaluation with Emerging Technology

Attachment File
Abstract
We have developed a method of applying swept-sine signals to DUTs with the objective of achieving high-speed measurement of the equivalent-circuit parameters (four elements: Ls, Cs, Rs, and Cp) of piezoelectric MEMS(micro-electromechanical systems). Based on this development, we propose a solution that makes use of a PRBS (pseudo-random binary sequence) pattern that reduces test costs by utilizing an inexpensive digital-pin resource from among the measurement resources for ATE (automated test equipment).
 
Keywords
MEMS;Piezoelectric MEMS;Piezoelectric oscillator;Swept-sine;PRBS
Speaker
Mitsuo Matsumoto
Expert Engineer Advantest Corporation

Mr.Matsumoto is a expert engineer at ADVANTEST Corporation.
Specialty is developing application programs for measuring automotive semiconductor devices.
・ Measurement of piezoelectric MEMS by ATE
・ Measurement of minute current of 1pA or less by ATE
・ Measurement of minute capacitance of 1pF or less by ATE
・ Measurement of  automotive semiconductor devices by ATE
   (Many Pin Devices , Devices over 200 Pads on Wafer)

Previously, working on the development of ATE for automotive semiconductor measurement.

Submit Comment
Verify Code Change Another
All Comments
Important Date

  • Conference Date

    Aug 18

    2021

    to

    Aug 20

    2021

  • May 10 2021

    Draft paper submission deadline

  • Aug 16 2021

    Early Bird Registration

  • Aug 19 2021

    Contribution Submission Deadline

  • Aug 20 2021

    Registration deadline

Sponsored By
IEEE
Tongji University
Chinese Computer Federation
Organized By
Tongji University
Contact Information
Login to view full contact details
Previous Conferences