The 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) is one of the premier annual events reporting research results on all scientific aspects of Micro/Nanoscale Devices, Micro/Nanosystems, as well as their relevant technologies and industrial trends. This conference captures the rapid proliferation from the commitment and success of the multidisciplinary microsystems and nanotechnology research communities. In recent years, the annual IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has established the forum for presenting over 200 select papers in lecture and poster sessions. Its highly integrated format provides ample opportunities for interactions among attendees, presenters and exhibitors. While the current COVID-19 pandemic and global travel restrictions impose unprecedented challenges on having the conference in traditional fashion, the IEEE MEMS 2021 will be the first-ever online/virtual conference in this series, and will be the international forum where our multidisciplinary communities showcase our resilience and sustained endeavors, in advancing the field and venturing into new frontiers.
Sponsor Type:6
Philip Feng
University of Florida
USA
Niclas Roxhed
KTH Royal Institute of Technology
SWEDEN
Haixia "Alice" Zhang
Peking University
CHINA
The major areas of activities in the development of MEMS/NEMS solicited and expected at this conference include but are not limited to:
Design, simulation and analysis tools with experimental verification
Fabrication technologies and processes
Silicon and beyond-silicon materials (e.g., piezoelectric, ferroelectric, wide-bandgap, 2D materials, soft materials, composites, etc.)
Electro-mechanical integration techniques
Assembly and packaging approaches
Metrology and operational evaluation techniques
System architectures
Jan 25
2021
Jan 29
2021
Draft paper submission deadline
Registration deadline
2019-01-27 South Korea Seoul
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems2017-01-22 United States Las Vegas,USA
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems2016-01-24 China Shanghai, China
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems2015-01-18 Portugal
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2013-01-20 China 台北市
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems
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