Introduction

The 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) is one of the premier annual events reporting research results on all scientific aspects of Micro/Nanoscale Devices, Micro/Nanosystems, as well as their relevant technologies and industrial trends. This conference captures the rapid proliferation from the commitment and success of the multidisciplinary microsystems and nanotechnology research communities. In recent years, the annual IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has established the forum for presenting over 200 select papers in lecture and poster sessions. Its highly integrated format provides ample opportunities for interactions among attendees, presenters and exhibitors. While the current COVID-19 pandemic and global travel restrictions impose unprecedented challenges on having the conference in traditional fashion, the IEEE MEMS 2021 will be the first-ever online/virtual conference in this series, and will be the international forum where our multidisciplinary communities showcase our resilience and sustained endeavors, in advancing the field and venturing into new frontiers.

Sponsor Type:6

Committee

Philip Feng
University of Florida
USA

Niclas Roxhed
KTH Royal Institute of Technology
SWEDEN

Haixia "Alice" Zhang
Peking University
CHINA
 

Call for paper

Important date

2020-10-20
Draft paper submission deadline

Submission Topics

The major areas of activities in the development of MEMS/NEMS solicited and expected at this conference include but are not limited to:

Design, simulation and analysis tools with experimental verification
Fabrication technologies and processes
Silicon and beyond-silicon materials (e.g., piezoelectric, ferroelectric, wide-bandgap, 2D materials, soft materials, composites, etc.)
Electro-mechanical integration techniques
Assembly and packaging approaches
Metrology and operational evaluation techniques
System architectures

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Important Date
  • Conference Date

    Jan 25

    2021

    to

    Jan 29

    2021

  • Oct 20 2020

    Draft paper submission deadline

  • Jan 29 2021

    Registration deadline

Sponsored By
IEEE Micro Electro Mechanical Systems TC