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Introduction
Development of micro -electro mechanical systems (MEMS) focusing on design, simulation and analysis tools, fabrication technologies and processes, integration techniques, and assembly and packaging approaches. Application of MEMS in sensors and actuators, microdevices for opto -mechanical systems, fluidic microsystems, biomedical engineering, wireless communication, power supply and energy harvesting and nano - electro -mechanical devices.
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Submission Topics

This Conference reflects from the rapid proliferation of the commitment and success of the Microsystems research community. In recent years, the IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has created the f
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Important Date
  • Conference Date

    Jan 20

    2013

    to

    Jan 24

    2013

  • Jan 24 2013

    Registration deadline

Sponsored By
Robotics and Automation Society - RA
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